Guerschon Yabusele led Tokyo silver medallists France with 17 points and Isaia Cordinier added 16.
Victor Wembanyama finished with 11 points despite another poor shooting performance.
France could meet Team USA on Saturday in a repeat of the final from three years ago if the heavily favoured Americans get past Nikola Jokic's Serbia in the second semi-final.
Dennis Schroder led Germany with 18 points. Fritz Wagner was the only other player in double figures for a team that will seek the consolation of a first-ever Olympic medal in the third-place playoff.
Germany, just as they did in their group-stage win over France in Lille, moved into an early lead with Schroder and Wagner quickly finding their touch.
The Germans moved 28-18 in front after a three from Nick Weiler-Babb to open the second quarter, but France flipped the momentum their way as Wembanyama made his mark.
He opened his account with a shot off the glass and then stonewalled Germany centre Daniel Theis, energising the Bercy Arena crowd and raising the decibel levels further with a three-point play.
France ended the half with a flourish and Wembanyama's dunk tied the game at 33 apiece.
Nicolas Batum nailed a three-pointer to put France ahead for the first time to begin the second half, with Yabusele getting into the act as well.
Yabusele, top scorer with 22 points in the quarter-final victory over Canada, carried his team with a series of baskets, but Schroder replied in equal measure.
With the lead switching back and forth in a gripping third quarter, France surged six points clear when Evan Fournier rattled in a shot from beyond the arc.
France went into the final period leading 56-50 and looked to have left Germany in the rear view mirror thanks to a three from Wembanyama followed by a bucket from Mathias Lessort.
Another Wembanyama block on Schroder resulted in Frank Ntilikina knocking down a three in transition to put France 13 points in front.
Germany refused to roll over and France struggled to make the game safe, Wagner netting a long three to slash the deficit to two with just under 40 seconds to play.
Wagner crucially lost his balance after hauling down a rebound in a one-possession game.
Wembanyama missed the chance to ice the game by hitting only one of two free throws, but Cordinier was less forgiving from the foul line as France sealed a return to the final to the delight of the home crowd.
